A new method was put forward to get movement displacement directly when applying standard reticle to AC servo driving control system to carry on high precise orientation for a very small object.

 
  • 摘要将标准刻线应用到对微细物体进行高精度定位的交流伺服驱动控制系统中,提出了一种新的直接获取运动位移的方法。
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