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- The mechanism of anisotropic etching the construction design of silicon anisotropic etching and two-side etching technology to produce microaccelerometer have been discussed in the paper. 本文讨论了各向异性腐蚀的机理;硅的各向异性腐蚀设计;双面光刻等与微硅加速度计有关的超精细加工问题。
- Computer Simulation of Silicon Anisotropic Etching 硅各向异性腐蚀的计算机模拟
- COMPUTER SIMULATION SYSTEM OF SILICON ANISOTROPIC ETCHING 硅各向异性腐蚀三维计算机模拟系统的建立
- Simulation of Silicon Anisotropic Etching Using Cellular Automata Method 硅各向异性腐蚀的原子级模拟
- Progress on the Modelling and Simulation of Silicon Anisotropic Etching 硅各向异性腐蚀模型及其模拟进展
- Study on Simulation of Silicon Anisotropic Etching Using Cellular Automata Method 元胞自动机方法模拟硅的各向异性腐蚀研究
- silicon anisotropic etching 硅各向异性腐蚀
- This paper has Studied anisotropic etching mechanism of St in KOH scution by using collision theory. 本文应用碰撞理论研究了硅在KOH溶液中各向异性腐蚀的机理。
- The probe is composed of two single-faced force probes with a similar structure as formerly developed force probe based on the piezoresistive effect and anisotropic etching. 工艺过程中一共了采用四次光刻,压敏电阻采用硼扩散工艺制作。
- Study on anisotropic etching of silicon in hydrazine 肼对硅片的各向异性腐蚀技术研究
- Anisotropic Etching Micro Dynamic Simulation of Crystalline Silicon 单晶硅各向异性腐蚀的微观动态模拟
- New type of magnetic sensitivity transistor is based on SOI,whose design principle and process are expatiated,and whose recombination region is set by anisotropic etching technology in MEMS. 构成新型磁敏三极管的复合区采用MEMS中的各向异性腐蚀技术进行设置,给出了这种复合区的复合机理。
- Research Development on Wet Anisotropic Etching Mechanism of Crystal Silicon 单晶硅各向异性湿法腐蚀机理的研究进展
- Study and Analysis of Anisotropic Etching 各向异性腐蚀技术研究与分析
- Study on Anisotropic Etching in Reactive Ion Etching of PMMA 反应离子刻蚀PMMA的各向异性刻蚀研究
- That is a beautiful etching of a bird. 那是一只鸟的漂亮的蚀刻画。
- The silicon chips are less than a millimeter thick. 这些矽片厚度不足一毫米。
- anisotropic etching of silicon 硅各向异性腐蚀
- In order to modify the defect of metal mask, we propose to use TMAH anisotropic wet etching process to fabricate thin silicon shadow masks. 为了改善金属遮罩的缺点,我们使用非等向湿蚀刻的方式用(100)矽晶片制作矽材料蒸镀遮罩。
- Hanging on the wall was a fine etching of the church. 挂在墙上的是一幅精致的教堂蚀刻板画。