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- Reactive Ion Beam Etching and Its Application 反应离子束刻蚀及其应用
- reactive ion beam etching (RIBE) 反应离子束刻蚀
- TECHNOLOGY OF REACTIVE ION BEAM ETCHING OF BLAZED GRATINGS 反应离子束刻蚀闪耀光栅技术
- Keywords highly oriented pyrolytic graphite;focused ion beam etching;electron beam lithography;reactive ion etching; 高定向热解石墨;聚焦离子束刻蚀;电子束曝光;反应离子刻蚀;
- reactive ion beam etch 活性离子束腐蚀
- reactive ion beam etching 反应离子束刻蚀
- reactive ion beam 活性离子束
- reactive ion beam oxidation 活性离子束氧化
- It is a technique called ion beam writing. 这一技术被称为离子束刻写。
- Ion beam mutation has significant bio-effect. 摘要离子诱变具有显著的生物学效应。
- The reactor is capable of working in the RIE (reactive ion etching) mode and also in the plasma etching mode. 反应腔拥有在RIE(反应离子刻蚀)模式和等离子刻蚀模式下工作的能力。
- The 6 achievements on Ion Beam Bio-engineering of Low Energy were outlined. 摘要简述了低能离子束生物技术在6个主要方面的研究成果。
- Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching (ECR-RIE) equipment to improve its property of weave. 摘要采用微波电子回旋共振等离子体反应离子刻蚀(ECR-RIE)装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
- Ion beam induced surface modification of polymer was extensively discussed. 介绍了运用高能离子束对聚合物材料进行表面改性的新工艺。
- The experiment of fully automatic reactive ion etching on 3 inch GaAs wafer is described. 介绍了全自动反应离子腐蚀3英寸GaAs片的实验研究工作。
- Allison scanner for high-current ion beam emittance measurements[J]. 引用该论文 徐蓉;邹宇斌;高淑丽;郭之虞;彭士香;钱锋;赵捷.
- The arrays were subsequently treated with reactive ion etching (RIE) to slightly reduced the size of the sphere. 制程的开发首先利用黄光微影制作有高低差的沟槽图样，再将单层奈米球排入沟槽之中。
- Antireflective film prepared by periodic ion beam assisted deposition[J]. 引用该论文 张大伟;黄元申;贺洪波;邵建达;范正修.
- Reactive ion etching (RIE) process utilized to form giant magnetoresistive (GMR) spin valve sensing elements was investigated experimentally. 对巨磁电阻自旋阀磁场传感器制作中的关键技术之一:自旋阀薄膜的反应离子刻蚀(RIE)工艺,进行了试验研究。
- In this paper the etching (RIE) of poly-Si of the electron cyclotron resonance (ECR) reactive ion using CF 4 and Ar was reported. 报道了用CF4和氩气Ar作为工作气体的ECR反应离子刻蚀多晶硅 (poly Si)技术。
