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- Micromachined gyroscope is a kind of typical micro-electro-mechanical system(MEMS) device, which consists of sensor, actuator, and control circuit, etc. 基于micro electro mechanicalsystem(MEMS)技术的微机械陀螺是集传感器、致动器、检测与控制等于一体的复杂多学科交叉系统 ,其整体特性是各个子系统综合作用的结果。
- The electromechancial interface model of silicon micromachined gyroscope is established.The impacts of these parasitic capacitances on interface circuit are analyzed. 建立了某种硅微机械陀螺仪的电路模型,分析了寄生电容对接口电路的影响。
- The basic principle of micromachined gyroscope with magnetic-suspension rotor based on MEMS is introduced,especially the principle of rotation is discussed. 介绍了基于MEMS技术的磁悬浮转子微陀螺的基本原理,重点对旋转的原理进行讨论,给出相应实现方案的指标分析和系统设计,并进行了实验。
- The capacitances in the structure of silicon micromachined gyroscope( SMG) are analyzed, in order to reduce parasitic capacitances in the structure and increase the signal noise ratio (SNR). 为减小杂散电容提高信噪比,分析了硅微机械陀螺仪结构中的电容。
- Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind of an-gular rate sensor, which has the same working mechanism as traditional mechanical gyroscope. 电磁悬浮转子微陀螺(MGELR)是一种新型的角速率传感器;它和传统机械陀螺具有相同的工作机理.
- A new monolithic integrated three-axis micromachined gyroscope is designed and tested.It is indicated that the gyroscopes run in expected mode. 设计了一种单片集成三轴微机械陀螺,制造了一批样机,进行了初步的驱动特性的实验研究,研制结果表明,陀螺性能符合设计要求。
- Research on decoupled micromachined gyroscope 一种解耦的微机械陀螺研究
- Vacuum packaged silicon micromachined gyroscope 真空封装的硅微陀螺仪
- silicon micromachined gyroscope(SMG) 硅微陀螺仪
- Fabrication of Z-axis micromachined gyroscope with DDSOG process 采用DDSOG工艺加工Z轴微机械陀螺仪实验
- Electrical analogue of the vibrating micromachined gyroscope 振动式微机械陀螺的电学模拟
- A Novel Micromachined Gyroscope Based on Slide-film Damping Effects 一种基于滑膜阻尼效应的新型微机械陀螺
- Design of a Driver Circuit for Rotation of Micromachined Gyroscope 磁悬浮转子微陀螺旋转驱动方式研究
- EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE 振动式微机械陀螺的等效电学模型
- Study on a Silicon Micromachined Gyroscope with Fence Structure 一种栅型结构微机械陀螺的研究
- Vibratory silicon micromachined gyroscopes need to check extremely small signal from all kinds of noises. 振动式硅微陀螺仪要在各种噪声干扰下,检测出极其微弱的有用信号。
- Electrical Simulation of a Micromachined Gyroscope's Self-excited Driving Mode 一种微机械陀螺自激驱动方式的电学模拟
- Design on micromachined gyroscope with electromagnetic levitating rotor 磁悬浮转子微陀螺的设计技术
- Research on feedback control system of sense signal in micromachined gyroscope 微机械陀螺仪检测反馈控制系统研究
- For Micromachined Gyroscopes, the vibration amplitude in driving direction changes with the input angle velocity, thus the measuring precision is degraded. 在振动式微陀螺的工作过程中,输入角加速度的变化将导致驱动轴振动幅值的变化,从而降低微陀螺的测量精度。
