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- Micromachining technology, MEMS devices and their applications are surveyed in Chapter 1. The development of micromachined accelerometer is also summarized. 论文的第一章对微电子机械系统及其器件设计、制造技术和应用等发展状况进行了综述，重点综述了微机械加速度传感器的研究进展。
- high-g micromachined accelerometer 微加速度传感器
- micromachined accelerometer sensors 电荷放大器
- Design of upper limit of measurement range on capacitive micromachined accelerometer 电容式微机械加速度计测量范围上限设计
- micromachined accelerometer 微机械加速度计
- High Linearity Piezoresistance Micromachining Accelerometer with Low Range 低量程高线性压阻式微机械加速度传感器
- A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported. 介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
- This is the theory of a pendulum accelerometer. 摆式加速计的原理。
- Just rotate and the accelerometer does the rest. 只要旋转和加速度没有休息。
- Why MEMSIC Accelerometer could be used in Portable devices? 为什么美新加速度传感器可用于便携式设备?
- Accelerometer: Instrument that measures acceleration. 加速度计:一种测量物体速度变化率(即加速度)的仪器。
- In some cases the entire accelerometer case is ground isolated. 在某些情况中，整个加速表外壳是接地绝缘的。
- A small recording accelerometer in the model furnishes data on its behavior. 模型中装有小型加速器用以记录其运动状态的数据。
- Less benefit is achieved on this vehicle by use of the accelerometer. 在这个飞行器上使用加速度计带来的好处不大。
- The pendulous accelerometer design had much in common with the gyro design. 摆式加速度计的设计与陀螺设计有很多共同之处。
- A Micromachined Electrostatic Servo Accelerometer 微机械静电伺服加速度计
- The pendulous accelerometer design had much in common with the gyro design . 摆式加速度计的设计与陀螺设计有很多共同之处。
- Analysis is made on thermally excited deflection and resonant frequency of the micromachined silicon resonant sensors. 分析了硅微机械谐振式传感器在热激励下的挠曲及谐振频率变化，建立了相应的数学模型，并对热挠曲灵敏度进行了优化设计。
- A flexile surface tends to bend, inducing strain on the accelerometer's base. 弹性表面会发生弯曲，包括加速表底座上的应变。
- Keywords: modulation, extinction ratio, silicon micromachined, Fabry-Perot, light switch, modulator. 关键词：调制，对比，矽微加工，法布里－珀罗，光开关，调制器。
