micro electron mechanical systems (MEMS)的用法和样例：
例句
- Silicon microphones have the potential to be the next high-volume MEMS application.
硅制麦克风很有可能应用于高容量的微机电系统。 - This edition also includes coverage of new topics such as nanotechnology, MEMS, electronic packaging, global climate change, electric and hybrid vehicles, and bioengineering.
这个版本还包括涵盖新课题，如纳米技术，微机电系统，电子封装，全球气候变化，电动和混合动力汽车，生物工程。
