The method has been successfully used in the system for measuring the 3-D surface topography of diffractive optical elements. 此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
The progress situations of Optical 3D shape measurement technique are presented in this paper, especially Grating Projection Profilometry and Digital Holography Profilometry. 本文对现阶段被广泛采用的光学三维形貌测量技术的发展现状进行详细介绍,重点分析现已应用在三维形貌测量中的光栅投影技术和数字全息技术。