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- In this paper, CIO thin film was prepared by DC reactive magnetron sputtering method in JGP450 type high vacuum magnetron sputtering apparatus, the surface morphology and structure of the CIO thin film were analyzed by AFM, XRD and XPS. 本文在JGP450型高真空磁控溅射台上,采用直流反应磁控溅射法制备了CIO薄膜,用AFM、XRD和XPS分析了样品的表面形貌、组织结构、化学态和元素价态。
- magnetron sputtering apparatus with two face-to-face targets 对靶磁控溅射
- Iron-nickel oxide films were deposited by DC reactively magnetron sputtered apparatus with two face-to-face targets. 采用对靶直流磁控溅射制备的铁镍氧化物薄膜,其电特性、电化学特性和结构与反应溅射过程中氧氩比之间有很大的关系。
- magnetron sputtering apparatus 对靶磁控溅射
- Si rich SiO2 films have been prepared by a rf magnetron sputter method. 用射频磁控溅射法制备了富硅二氧化硅薄膜。
- Study of Silicon Oxynitride Film Deposited by RF Magnetron Sputtering[J]. 引用该论文 朱勇;顾培夫;沈伟东;邹桐.
- Boron carbon nitride(BCN) thin films were deposited by radio frequency(RF) magnetron sputtering. 采用射频磁控溅射技术制备出硼碳氮(BCN)薄膜。
- Helium-charged Al films are prepared by direct current (DC) magnetron sputtering with a He/Ar mixture. 摘要采用氦氩混合气氛下直流磁控溅射沉积方法制备含有氦原子的金属铝膜。
- High quality nickel films have been successfully plated on cenosphere particles by dc magnetron sputtering at mom temperature. 摘要本文论述了在空心微珠表面磁控溅射镀金属薄膜的方法。
- TiB_2 and Ti-B-N coatings were prepared by magnetron sputtering on 1Cr18Ni9Ti stainless steel. 用磁控溅射法在1Cr18Ni9Ti不锈钢上沉积了TiB2和Ti-B-N涂层。
- A new type closed field-unbalanced magnetron sputtering technology for optical coatings is described. 介绍了一种制备高质量光学薄膜的新型闭磁场磁控溅射技术。
- Thin film manganin gages and ytterbium gages were fabricated by magnetron sputtering. 采用磁控溅射法制备锰铜薄膜,溅射和真空蒸发法制备镱薄膜。
- This system can be used either as multi-arc or magnetron sputtering PVD individually. 也可以单独作为磁控溅射或多弧离子镀膜机使用。
- AlN films with special function and excellent structure can be grown under proper conditions by magnetron sputtering. 采用磁控溅射技术,可以选用在适当的条件下制备具有特定功能与结构优良的氮化铝薄膜。
- Aluminum film was grown on modified fluorinated polymer composite films by rf magnetron sputtering. 摘要采用射频磁控溅射技术在改性氟塑料表面沉积铝层，制备了金属/氟化高聚物复合薄膜。
- The power supply will be convenient for controlling the magnetron sputtering coater automatically. 该电源为磁控溅射镀膜设备实现自动控制提供了方便。
- Study on the preparation and properties of antireflective ITO thin films by magnetron sputtering[J]. 引用该论文 李世涛;乔学亮;陈建国;王洪水;贾芳.
- Electrochromism of WO3 Films Deposited by Mid-Frequency Dual-Target Magnetron Sputtering Method[J]. 引用该论文 王丽阁;胡远荣;李国卿;谢为.
- Metal aluminum films were deposited on AAO templates by radio-frequency magnetron sputtering. 用射频磁控溅射法在阳极氧化铝模板表面制备了金属铝膜。
- Nanocrystallized 309 stainless steel coating has been fabricated on glass substrate by DC magnetron sputtering. 用动电位极化、恒电位极化及交流阻抗技术研究了309不锈钢及其溅射纳米涂层在0。
