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- Study of focused ion beam column with microwave ion source 微波离子源聚焦离子束光学系统的研究
- Keywords focused ion beam;liquid metal ion source (LMIS);emit needle; 聚焦离子束;液态金属离子源;发射尖;
- focused ion source 聚焦(束)离子源
- Focused Ion Beam is an advanced micro/nano technology for figure observation, orientation making-sample, component analysis, film deposition and maskless etching. 聚焦离子束技术是一种集形貌观测、定位制样、成份分析、薄膜淀积和无掩模刻蚀各过程于一身的新型微纳加工技术。
- The application of Freeman ion source linked to LC-2A ion implanter is described in the paper. 本文叙述了弗里曼(Freeman)离子源体联接在LC-2A型中能离子注入机上的应用;
- KEYWORDS : GIMS, ion source, anode layer, sputtering, TiN, ion plating, medium frequency, pulsed DC. 中文关键词:气离溅射、离子源、阳极层流、溅射、氮化钛、离子镀膜、中频、脉冲直流。
- TITAN ion source is a new ion source which can produce strong metal and gas ion beam. Use . TITAN离子源是一种新的能够同时产生强金属和气体离子束流的离子源。
- KEYWORDS: GIMS, ion source, anode layer, sputtering, TiN, ion plating , medium frequency, pulsed DC. 中文关键词:气离溅射、离子源、阳极层流、溅射、氮化钛、离子镀膜、中频、脉冲直流。
- An intense ECR ion source for ADS (accelerator driven sub-critical system) is described. 介绍了正在研制的一台强流ECR离子源。
- The beam drift phenomenon in the focused ion beam(FIB) system made byourselves are briefly introduced and the factors causing the drift amd measures toreduce the drift are discussed. 简要介绍了自制的聚焦离子束(FIB)系统中束着靶点的飘移现象,分析引起飘移的原因及所采取降低飘移的措施。
- The MC-SNICS ion source of NEC compact AMS system at the AMS laboratory of Peking University was upgraded recently. 摘要为提高样品测量效率,对MC-SNICS多靶位铯溅射负离子源进行了升级改进。
- FIB(Focused Ion Beam) is an advanced micro/nano technology for morphological observation,sample-making for accurate positioning,compositional analysis,film deposition and maskless etching. 聚焦离子束(FIB)技术是一种集形貌观测、定位制样、成份分析、薄膜淀积和无掩模刻蚀各过程于一身的新型微纳加工技术。
- Electric field of the emission system of a liquid metal ion source was simulated, based on the conventional dynamic protrusion model and the widely used charge simulation method. 摘要发射系统是液态金属离子源的关键部件之一,它的性能的优劣直接影响到整个离子源的工作稳定性和可靠性。
- In addition, the requirement of delivering 18O2 beams from the electron cyclotron resonance ion source can be satisfied by the obtained 18O2 gas. 此外,制得的气体能够满足电子回旋共振离子源提供18O重离子束的实验要求。
- Then the corresponding sigma matrix is given to further estimate the beam emittance extracted from electron cyclotron resonance ion source. 用旋转矩阵和聚焦矩阵重新推导了总的传输矩阵。
- Abstract The MC-SNICS ion source of NEC compact AMS system at the AMS laboratory of Peking University was upgraded recently. 摘要 为提高样品测量效率,对MC-SNICS多靶位铯溅射负离子源进行了升级改进。
- The purpose of the first part of this work has been to use an electromagnet to improve the performance of the Kaufman ion source. 电浆的电子,离子密度与温度是了解电离层结构的几个重要参数,而为了量测这些参数,科学家使用了数种实地量测的技术。
- The Pattern Generator in Focused Ion Beam Equipment 聚焦离子束装置中的图形发生器
- Because of the structure limitation, working state of the ECR ion source could not be judged by the color of gas discharging in discharge chamber. 由于受结构的限制,ECR离子源不能像高频源离子源那样通过观察气体放电的颜色判断其工作状态,所以在运行中调节状态非常困难。
- Focused Ion Beam Lithography Technology 聚焦离子束曝光技术