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- Fluorinated amorphous carbon(a-C:F) films were deposited using C_4F_8 and CH_4 as precursor gases by electron cyclotron resonance chemical vapor deposition (ECR_CVD). 采用电子回旋共振等离子体化学气相淀积(ECR-CVD)法;以C4F8和CH4为源气体制备了非晶氟化碳(a-C:F)薄膜.
- Optical gap of fluorinated amorphous carbon films 氟化非晶碳薄膜的光学带隙分析
- fluorinated amorphous carbon thin film 氟化非晶碳薄膜
- Effects of annealing on structural and electrical properties of fluorinated amorphous carbon films 氮气退火对氟化非晶碳膜结构和电学性能的影响
- Structural Analysis of Nitrogen Doped Fluorinated Amorphous Carbon Thin Films by Raman Spectroscopy 氮掺杂氟化非晶碳薄膜的拉曼光谱结构研究
- Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition 微波电子回旋共振等离子体化学气相淀积法制备非晶氟化碳薄膜的研究
- Thomas W. Mountsier, John A.Samuels, “Precursor Selection for Plasma deposited fluorinated amorphous carbon films”, Thin Solid Film 332, 362(1998 李坤翰，“使用矽烷偶合剂及辛氟甲苯为原料之电浆辅助化学气相沉积法制造备低介电膜之研究”，硕士论文，台湾科技大学化工系，2006。
- fluorinated amorphous carbon 非晶氟化碳
- Experimental Study on Infrared Film of Antireflective Amorphous carbon on Silicon[J]. 引用该论文 杨益民;郭建;杨国伟;蔡孟秋.
- Direct current metal filtered cathodic vacuum arc(FCVA) and acetylene gas(C_2H_2) are wielded to synthesize amorphous carbon films on Si(100). 采用直流金属磁过滤阴极真空弧(FCVA)制造出Ti和乙炔(C2H2)气体的双等离子体在单晶硅(100)上制备非晶态碳膜.
- The powders of carbon nanotubes (CNTs) are graphitized under condition of high temperature and pressure to transform amorphous carbon in CNTs. 对碳纳米管粉体在高温和高压进行处理,使其中的非晶碳转变成晶态碳,达到净化目的。
- Tetrahedral amorphous carbon films (ta C) have become a new type of wide band gap amorphous materials because of its valuable physical and chemical properties. 四配位非晶碳薄膜是近年来发展的一种新型宽带隙半导体材料,具有独特的物理和化学特性。
- A natural dark brown to black graphitelike material used as a fuel,formed from fossilized plants and consisting of amorphous carbon with various organic and some inorganic compounds. 煤一种天然的深褐色到黑色石墨样原材料，用作燃料，由植物化石形成，由非结晶碳和各种有机化合物与一些无机化合物组成。
- The results show that amorphous carbon films have high etching resistance against oxygen plasma, and etch rates of the films correlated not only with etching processing parameters, also with deposition conditions. 结果表明非晶碳膜对于氧离子体具有高的抗刻蚀性，其刻蚀率不仅与刻蚀的过程参量有关，而且决定于膜的沉积条件。
- The results suggested that the treatment of hydrogen could remove the amorphous carbon and the polar groups on MWCNTs, resulting in the decrease of surface area and water absorbing capacity and having the ends of MWCNTs cut. 经过纯化的MWCNTs(PMWCNTs)的吸水率远小于活性炭，比Carbopack B稍大，比表面积和Carbopack B相近。
- Amorphous carbon and carbon nano-onions are synthesized by carbon ion implantation into copper substrate heated at given temperatures, which is the result of electron beam irradiation. 铜基体上离子注入碳，并经过适当的热处理后，会在其表面析出无定形碳和碳纳米洋葱，这是由电子束的照射作用引发的。
- The Raman spectrum also shows that the amount of the component of amorphous carbon decreases as the growth time and discharge current density are increased. This is due to that the amorphous carbon is mainly contained at crystal boundary. Raman谱还表明金刚石膜内非晶碳成份随放电电流密度和生长时间增加而减少,并主要集中在晶粒界面之间。
- Due to the diffusion of amorphous carbon in interface layer, the structure of Mo/Si/C multilayer film was changed, and the double diffraction peaks during low-angle X-ray diffraction (LAXD) were observed. 同时,由于非晶C在高温条件下的扩散导致薄膜结构发生变化,观测到薄膜的小角衍射曲线中出现并临的双衍射峰结构。
- A natural dark brown to black graphitelike material used as a fuel, formed from fossilized plants and consisting of amorphous carbon with various organic and some inorganic compounds. 煤一种天然的深褐色到黑色石墨样原材料，用作燃料，由植物化石形成，由非结晶碳和各种有机化合物与一些无机化合物组成
- Abstract: Pulsed laser deposition(PLD) was used to prepare superhard amorphous carbon films.The films’ surface appearance, structure, residual stress, hardness and XPS spectra were researched. 摘 要： 用脉冲激光沉积在不同条件下制备非晶碳超硬薄膜，研究了非晶碳超硬薄膜的表面形貌、结构、应力、硬度以及能谱等。
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