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- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等离子体工艺对90nm铜大马士革工艺器件的损伤.
- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已经被用来替代Al-Cu合金连线和W 塞,因为与铝相比,Cu有较高的导电率与较强的抗迁移能力。
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/低介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(DRAM)和逻辑电路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(RAM)逻辑电路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日来,对IC元件制造而言,由于金属铜内连接双镶嵌制程的需求,电镀铜也已经变成一项重要制程步骤。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金属化的双大马士革处理和面阵列芯片封装互连的C4(倒装)技术使电化学技术置于最复杂的制造工艺技术之间。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介绍了基本的铜互连布线技术 ,包括单、双镶嵌工艺 ,CMP工艺 ,低介电常数材料和阻挡层材料 ,及铜互连布线的可靠性问题
- Copper/low k dual damascene processLI 双嵌入式低k介电层/铜工艺技术
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 无中间层双大马士革中FSG刻蚀技术研究
- David is famous for his billiards technic. 大卫因他的台球技术而出名。
- The road opened out into a dual carriageway. 这条路已扩展成了复式车行道。
- dual damascene 双大马士革
- dual damascene process 双嵌入(双大马士革)工艺
- His dual role as a composer and a conductor made him very busy. 他作曲家和指挥家的双重身份使他非常繁忙。
- At that point, the road opens out and becomes a dual carriageway. 公路在那个地方变宽了,变成了双车道。
- The choice of rivet in riveting technics. 铆接工艺中铆钉的选择。
- This truly is a Damascene conversion. 这确实是一次质的转变。
- How to transfer the fool technics? 如何调用傻瓜工艺呢?
- Plane Design and Printing Technics. 平面设计策划及印刷工艺。
- His painting technic provided example to posterity. 在绘画技巧方面,他给后人提供了许多借鉴。