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- Dual Damascene Cu is being used to replace Al-Cu metal lines and W vias & plugs. Cu已经被用来替代Al-Cu合金连线和W 塞,因为与铝相比,Cu有较高的导电率与较强的抗迁移能力。
- Plasma-induced damage on 90nm Cu dual Damascene technology devices is investigated. 研究了等离子体工艺对90nm铜大马士革工艺器件的损伤.
- Dual damascene technology of Cu / low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/低介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(DRAM)和逻辑电路器件中。
- Dual damascene technology of Cu/ low dielectric layer is introduced in this paper, andthis technology has been used in manufacturing DRAM and logic devices. 介绍了铜/介电常数介电层的双嵌入式工艺,该工艺已大规模应用于动态记忆存储器(RAM)逻辑电路器件中。
- Recently, copper electroplating also becomes an important process step for IC device manufacture due to the requirement of Dual Damascene process of copper interconnection. 近日来,对IC元件制造而言,由于金属铜内连接双镶嵌制程的需求,电镀铜也已经变成一项重要制程步骤。
- Copper Dual Damascene processing for chip metallization, and C4(Flip-chip) technologies of planar array chip packaging interconnection cause the electrochemical technologies place in the most complication processing for chip fabrication processing. Cu芯片金属化的双大马士革处理和面阵列芯片封装互连的C4(倒装)技术使电化学技术置于最复杂的制造工艺技术之间。
- This paper introduces basic technology of copper interconnect, including single and dual damascene technology, CMP technology, low k dielectric materials, barrier materials and reliability of copper interconnect. 文中介绍了基本的铜互连布线技术 ,包括单、双镶嵌工艺 ,CMP工艺 ,低介电常数材料和阻挡层材料 ,及铜互连布线的可靠性问题
- Copper/low k dual damascene processLI 双嵌入式低k介电层/铜工艺技术
- The Study of FSG Etching in Non-Stop Layer Dual Damascene Structure 无中间层双大马士革中FSG刻蚀技术研究
- She knows why the metal is the good conductor. 她知道金属为什么是好的导体。
- The road opened out into a dual carriageway. 这条路已扩展成了复式车行道。
- Can I fasten these metal plates with rivets? 我可以用铆钉把这些金属板固定在一起吗?
- You need a strong adhesive to bond wood to metal. 需要强力胶才能把木料粘在金属上。
- The car was now just a pile of twisted metal. 那辆汽车已经成了一堆压缩的废铁了。
- The metal basin clattered down the stone stairs. 金属盆子沿着石阶滚了下去,发出咣啷声。
- Aluminum is a kind of light silvery metal. 铝是一种轻薄并呈银色的金属。
- The aeroplane wing showed signs of metal fatigue. 机翼显出有金属疲劳的现象。
- The metal frame tends to twist under pressure. 这种金属框受压後容易变形。
- dual damascene 双大马士革
- The ship was broken up for scrap metal. 这艘船拆毁了当废铁用。