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- In addition, we reduced the air columns around the cavity and simulated the photonic bandgap and fabricated the devices by E-beam lithography and deep dry etching process. 未来将会对共振腔的几何形状做修正来符合光传播时的场型,并以此设计做出元件并加以量测。
- To approach as a resist in dry etching processing, etching properties of the films in oxygen plasma have been investigated. 为了探索该种薄膜在干刻蚀工艺过程中用作掩膜的可能性,还研究了它在氧离子体中的刻蚀性能。
- dry etching process 干蚀刻工艺
- I plant mainly in metal etching process. 我厂主要以金属蚀刻加工。
- Homogeneous microstructure which is most suitable for the etching process. 组织均匀,最适用于精密蚀花加工。
- Aquatint:It is an etching process on copper or steel by means of nitric acid. 水彩色调:用硝酸在钢片或铜片上作腐蚀的蚀刻法。
- A dry etch technology for poly-silicon using Cl2, SF6 and N2 mixed gas has been developed on Tegal 1512e. Different effects of positive resist mask for LDD and SiO2 mask for SST on the process are discussed. 在Tegal1512e设备上,采用Cl_2、SF_6、N_2混合气体,开发了多晶硅干法腐蚀工艺,讨论了LDD的正胶掩膜及SST的SiO_2掩膜对工艺的不同影响。
- John has been trying to develop a new etching process for months and he's finally struck oil. 约翰已花了几个月的时间来创造一种新的蚀刻工序,他最终获得了成功。
- The principle and the main parameters of the dry etching for silicon dioxide are introduced. 摘要阐述了二氧化矽干法蚀刻的原理和主要的蚀刻参数。
- The resolution of an etching process is a measure of the fidelity of pattern transfer. 刻蚀工艺的分辨率是图形转移保真度的量度。
- With the principles and processes of photolithography,dry etching and wet etching,the fabrication of the head slider were experimented. 然后利用光刻、湿法刻蚀和干法刻蚀的工艺及设备,分别进行了该磁头滑块结构的湿法和干法刻蚀试验,给出了刻蚀参数及所加工的磁头照片;
- The lithographic and etching process for a membrane creates a mesh of metal wires with silicon dioxide filling the space between them. 薄膜先以微影及蚀刻制程制作出金属线路,线路之间则填入二氧化矽。
- Using patented technology: acid etching process to make the blade of graters sharper. 本版权所有中华经贸网,任何人未经同意不得擅自引用!
- PI (6FDA/BAPS) and PI (DSDA/HFBAPP) are verified including structure, viscosity, sensitivity, contrast, thermostabibity, dry etching resistance and other lithography parameters. 将合成之PI(6FDA/BAPS)与PI(DSDA/HFBAPP)做一连串基本性质鑑定与微影性质测试,结果证明此二种聚亚醯胺都具有优良电子束阻剂之特性。
- The ion beam etching process in fabricating refractiue microlens is simulated by setting up the etching model of Argonion beam to resist microlens. 建立氩离子束对光刻胶微透镜的刻蚀模型,模拟折射微透镜制备中的离子束刻蚀工艺过程。
- In order to modify the defect of metal mask, we propose to use TMAH anisotropic wet etching process to fabricate thin silicon shadow masks. 为了改善金属遮罩的缺点,我们使用非等向湿蚀刻的方式用(100)矽晶片制作矽材料蒸镀遮罩。
- Aquatint:It is an etching process on copper or steel by means of nitric acid. In this technique, a thin layer of resin dust is sprinkled on the plate and heated to make it adhere. 水彩色调:用硝酸在钢片或铜片上作腐蚀的蚀刻法。这个技巧是在版面上洒上一层薄薄的树脂粉,加热把它粘附于版面。
- After two layers of SiO2/ SiON with different refractive are finished, the designed mask pattern is printed on the film by photolithography, then through ICP for dry etching, the waveguide structures are obtained, for example AWG/EDG we obtained. 两层不同折射率的二氧化硅/氮氧化硅薄膜制备好后,再根据设计好的波导图形,经过光刻,感应耦合等离子体刻蚀(ICP)等工艺,制成所需要的光波导器件,如本研究中心制成的AWG、EDG等。
- The Nb/Al-AlOx/Nb all-niobium tunnel junctions were fabricated by dc magnetron sputtering, with selective niobium etching process and selective niobium anodiza-tion process. 用磁控溅射方法及选择铌阳极氧化和选择铌刻蚀工艺制备了Nb/Al-AlO_x/Nb全铌隧道结,给出了工艺要点。
- The most competitive technologies of transferring solid membrane mainly include bond and etch process and smart cut process. 最具竞争力的转移固体薄膜技术主要有键合加选择性腐蚀工艺和注氢智能剥离工艺。