The BOE manufacture and laser or electron beam writing are much riper methods.The BOE manufacture has disadvantages of long period,high cost and difficult alignment. 衍射光学元件有很多制作方法,比较成熟的有二元光学元件加工方法和激光或电子束直写技术加工方法。
In the BOE laser direct-writing device, the adjusting effect of spindle velocity is one of the key factors for determining the lithography effectiveness and accuracy. 在二元光学元件激光直写设备中,主轴速度调节效果的好坏是决定刻划效率与精度的关键因素之一。