MBE has a lot of unique advantages because it supplies precise controls of the film growth processes and conditions far from equilibrium. 由於它能對薄膜生長進行精確的控制，並且是一種遠離平衡態的生長技術，因而它具有許多獨特的技術優勢。
The structrures of diamond micromotor and microresonator are fabricated to demonstrate two kinds of selective growth thechnologies of CVD diamond film respectively. 以金剛石微馬達和微型諧振子結構製備為例，介紹化學氣相沉積金剛石薄膜的兩種選擇生長技術。
