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- High-precision prealigner is a crucial component in wafer transport device for modern photolithographer. 摘要高精度的預對準是設計現代光刻機矽片傳輸系統需要解決的核心問題之一。
- The micromachining process like photolithograph, electroplate and sputtering etc is adopted to fabricate the stator of MGELR. 隨著懸浮線圈內徑增加,懸浮力呈線性增加。
- They include laser doping, laser annealing, laser depositing film, solid-phase reaction induced by laser and laser photolithograph. 這些應用大致涵蓋激光摻雜、激光退火、激光沉積薄膜、激光引發固相反應和激光光刻等幾方面。
- Keywords Monolayers;Molecular architecture;Photolithograph;Pattern;Silicon surface; 單層膜;分子構築;光刻;圖形;硅表面;
- PHLGR Photolithographer 照相製版師
- photolithographn. 影印石版