For this aim, the model-driven method is introduced to design MARP. 為此，將模型驅動方法引入到製造聯盟資源計劃的開發中。
Nanolithography experiments were presented to verify the effectiveness of the new actuating method and positioning error compensation method. 納米刻畫實驗驗證了該新型驅動方法及誤差補償的有效性。
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