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- This paper has Studied anisotropic etching mechanism of St in KOH scution by using collision theory. 本文应用碰撞理论研究了硅在KOH溶液中各向异性腐蚀的机理。
- The probe is composed of two single-faced force probes with a similar structure as formerly developed force probe based on the piezoresistive effect and anisotropic etching. 工艺过程中一共了采用四次光刻,压敏电阻采用硼扩散工艺制作。
- The mechanism of anisotropic etching the construction design of silicon anisotropic etching and two-side etching technology to produce microaccelerometer have been discussed in the paper. 本文讨论了各向异性腐蚀的机理;硅的各向异性腐蚀设计;双面光刻等与微硅加速度计有关的超精细加工问题。
- New type of magnetic sensitivity transistor is based on SOI,whose design principle and process are expatiated,and whose recombination region is set by anisotropic etching technology in MEMS. 构成新型磁敏三极管的复合区采用MEMS中的各向异性腐蚀技术进行设置,给出了这种复合区的复合机理。
- Computer Simulation of Silicon Anisotropic Etching 硅各向异性腐蚀的计算机模拟
- Study and Analysis of Anisotropic Etching 各向异性腐蚀技术研究与分析
- Study on Anisotropic Etching in Reactive Ion Etching of PMMA 反应离子刻蚀PMMA的各向异性刻蚀研究
- Study on anisotropic etching of silicon in hydrazine 肼对硅片的各向异性腐蚀技术研究
- COMPUTER SIMULATION SYSTEM OF SILICON ANISOTROPIC ETCHING 硅各向异性腐蚀三维计算机模拟系统的建立
- Anisotropic Etching Micro Dynamic Simulation of Crystalline Silicon 单晶硅各向异性腐蚀的微观动态模拟
- Simulation of Silicon Anisotropic Etching Using Cellular Automata Method 硅各向异性腐蚀的原子级模拟
- Research Development on Wet Anisotropic Etching Mechanism of Crystal Silicon 单晶硅各向异性湿法腐蚀机理的研究进展
- Progress on the Modelling and Simulation of Silicon Anisotropic Etching 硅各向异性腐蚀模型及其模拟进展
- That is a beautiful etching of a bird. 那是一只鸟的漂亮的蚀刻画。
- Hanging on the wall was a fine etching of the church. 挂在墙上的是一幅精致的教堂蚀刻板画。
- Study on Simulation of Silicon Anisotropic Etching Using Cellular Automata Method 元胞自动机方法模拟硅的各向异性腐蚀研究
- Anisotropic etching during fabrication of si -based piezoresistive pressure sensors 压力传感器中的各向异性腐蚀技术
- Precision Bulk Micromachining Based on KOH Anisotropic Etching Using Ultrasonic Agitation 使用超声搅拌实现精密KOH各向异性体硅腐蚀
- Keywords anisotropic etching;convex corner undercutting compensation;KOH etchant; 各向异性腐蚀;凸角补偿;氢氧化钾腐蚀液;
- Anisotropic - A process of etching that has very little or no undercutting. 各向异性-在蚀刻过程中,只做少量或不做侧向凹刻。