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- Direct current metal filtered cathodic vacuum arc(FCVA) and acetylene gas(C_2H_2) are wielded to synthesize amorphous carbon films on Si(100). 采用直流金属磁过滤阴极真空弧(FCVA)制造出Ti和乙炔(C2H2)气体的双等离子体在单晶硅(100)上制备非晶态碳膜.
- Tetrahedral amorphous carbon films (ta C) have become a new type of wide band gap amorphous materials because of its valuable physical and chemical properties. 四配位非晶碳薄膜是近年来发展的一种新型宽带隙半导体材料,具有独特的物理和化学特性。
- The results show that amorphous carbon films have high etching resistance against oxygen plasma, and etch rates of the films correlated not only with etching processing parameters, also with deposition conditions. 结果表明非晶碳膜对于氧离子体具有高的抗刻蚀性，其刻蚀率不仅与刻蚀的过程参量有关，而且决定于膜的沉积条件。
- Optical gap of fluorinated amorphous carbon films 氟化非晶碳薄膜的光学带隙分析
- Hydrogenated amorphous carbon films 氢化非晶碳薄膜
- Hydrogenated amorphous carbon film 含氢非晶碳膜
- Several amorphic carbon films with different thickness were deposited on singlecrystal silicon by means of pulse laser ablating graphet target. 在室温下 ,用激光烧蚀石墨靶方法在单晶硅衬底表面沉积了不同厚度的非晶碳膜。
- Deposition and Etching of Amorphous Carbon Films in ECR Plasma 使用ECR等离子体沉积和刻蚀非晶碳薄膜(英文)
- Several amorphic carbon films with different thickness were deposited on single crystal silicon by means of pulse laser ablating graphet target at room temprature. 在室温下,用激光烧蚀石墨靶方法在单晶硅衬底表面沉积了不同厚度的非晶碳膜。
- Raman analysis of laser annealed nitrogen doped amorphous carbon film 掺氮类金刚石薄膜激光退火的Raman光谱分析
- Effects of annealing on structural and electrical properties of fluorinated amorphous carbon films 氮气退火对氟化非晶碳膜结构和电学性能的影响
- Field Emission with Low Turn-on Voltage from Hydrogenated Amorphous Carbon Films 氢化非晶碳膜的低阈值场发射
- Green and Blue Light Emitting from Hydrogenated Amorphous Carbon Films Diluted by Hydrogen 氢稀释制备的非晶碳膜的绿光和蓝光发射
- Biomedical nitrogen-doped amorphous carbon films prepared using filtered vacuum arc deposition 磁过滤弧沉积合成生物医用掺氮无定型碳膜
- Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition 微波电子回旋共振等离子体化学气相淀积法制备非晶氟化碳薄膜的研究
- Raman Spectra and Surface Morphology of Nitrogen-doping Tetrahedral Amorphous Carbon Films 掺氮四配位非晶碳薄膜的拉曼光谱和表面形貌
- Raman characteristics and intrinsic stress of tetrahedral amorphous carbon films with different film thicknesses 不同厚度四面体非晶碳薄膜的拉曼表征和内应力
- Preparation and Study of the Tribological Properties of Tetrahedral Amorphous Carbon Film 四面体无定型无氢非晶碳膜的制备及其摩擦学性能研究
- Influence of Argon Ion-assisted Bombardment on Amorphous Carbon Film Deposited by Laser Ablation 氩离子辅助轰击对激光烧蚀法制备非晶碳膜的影响
- The microstructure and properties of tetrahedral amorphous carbon films deposited by filtered arc with accelerating at different energetic grades 不同能级加速过滤电弧沉积四面体非晶碳膜的结构和性能
