Zr-Si-N film is a composite that is composed of nanocrystalline-ZrN and amorphous Si3N4.Zr-Si-N film is an excellent diffusion barrier and has good application potential.

• Zr-Si-N膜由纳米晶ZrN与非晶Si3N4组成双相复合结构，是一种性能优良的扩散阻挡层，具有很大的应用前景。