X-ray photoelectron spectroscopy analysis reveals that O2 plasma will react with carbon atoms in the polyimide structure to form C-O bonding on the surface and destroy the polyimide structure.

• 由实验结果可以发现，O2电浆将会与含氟聚亚醯胺中的C原子反应形成C-O键结，并进一步破坏含氟聚亚醯胺表面结构。