With the increase of N2 partial pressure, the nanohardness of Ti-Si-N coatings, and the ratio of TiN phase to Si3N4 phase decrease, as well as the average size of TiN crystalline.

• 随着氮气分压的增加,纳米硬度逐渐下降。 随着氮气分压的增加,膜层中TiN相和Si3N4相的比例减小,同时,TiN晶粒的平均尺寸也逐渐减少。