With the Finite Element Method (FEM), the distortion of the elements will decrease theprecision, so Element Free Galerkin Method (EFGM) is used to solve this problem.

 
  • 薄膜尺寸非常小;用有限元方法进行单元剖分时会产生严重的网格变形;降低计算精度;这里选用无单元 Galerkin 方法有效地解决了这一问题.
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