We present compensation of convex corners and fabrication technology of cantilever beam, which is manufactured on (100) silicon etched by EPW, and take use of spherical mask to compensate them.

• 研究采用EPW腐蚀(100)硅片制作微悬臂梁的凸角补偿方法及制作工艺，给出采用圆形掩膜对(100)硅凸角进行补偿。