Various aspects of an inductively coupled plasma, including its power coupling efficiency, its spatial electrical field distribution, and plasma resistanceand inductance, were simulated on the basis of a transformer model.

• 基于变压器模型,本文对感应耦合等离子体中线圈产生的空间电场分布、等离子体电阻、电感及功率耦合效率等进行了数值计算。