Variable angle spectroscopic ellipsometry(VASE)is a instrument for measuring optical film refractive index and thickness and is a powerful technique for research on new materials and processes.

• 可变角度的光谱椭偏仪(VASE)是一种测量光学薄膜折射率和厚度的仪器，它对于新材料和新过程的研究是一种强有力的技术手段。