Using plasma enhanced chemical vapor deposition system, intrinsic hydrogenated nanocrystalline silicon films and P-doped ones have been fabricat ed. The dependence of Raman shift on the grain size and doping concentration has been systemically studied.

• 通过等离子增强化学气相沉积法 ；制备了本征和掺磷的氢化纳米硅薄膜 (nc- Si:H) ；研究了晶粒尺寸和掺杂浓度对纳米硅薄膜喇曼谱的影响 .