Two typical cases in microprobe, multielectrode array (MEA) and micro-force sensor, have been applied for illustrating the variety of fabricating MEMS micro-probes.

• 文中发展两种微探针之制作，包含整合导线且具有适当绝缘之微电极阵列，以及整合平板与弹簧之微力感测器元件结构，以阐述微机电制程制作微探针的多样性。