To improve the quality of Ta Spinnerets with high hardness and alkali-proof corrosion, HFCVD is used to deposit crystalline diamond films with different sizes of grain on carbonized Ta spinnerets.

• 摘要为改善钽喷丝头的品质，提高其硬度和耐碱腐蚀能力，利用热丝CVD制备不同粒径的金刚石薄膜，并通过对钽衬底的碳化处理，成功使之沉积于纯钽喷丝头表面，对纯钽喷丝头进行表面强化。