TiO 2 thin films were prepared by chemical vapour deposition(CVD) with the source of tetra iso propyl titanate (Tiliso OC 3H 7) 4,TPT) and its optical properties are studied.

 
  • 以四异丙醇钛(简称TPT)为钛源物质,采用常压化学气相沉积(CVD)法制备了TiO2膜,并对其光学性质进行了研究。
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