Thus, experimented with B and P ratio of ILD material BPSG, BPSG reflow conditions and combined poly gate CD to find the root cause and the method to solve the problem.

• 针对接触窗桥接这种失效模式，通过实验改变内层介电材料(ILD)硼磷硅玻璃中的硼磷比例，回火条件和多晶硅栅极的关键尺寸等相关工艺，再现了晶圆失效的模式，并找到了改善和消除失效的方式。