This paper summarizes the ultraprecision cutting technologies for photo, eltectronic and mechanical elements with geometric accuracy up to micron, submicron or surface roughness up to nano.

• 文章对在光学、电子和机械元器件的加工达到微米或亚微米级型面精度及纳米级表面粗糙度的超精密切削技术进行了综述。