This paper reviews state-of-the-art research progress of Diamond Thin Film (DTF) with emphasis on their preparation methods, growth mechanism and various properties characterizing techniques.

• 本文综述了金刚石薄膜(DTF)研究的最新进展,着重分析了金刚石薄膜的制备方法、成膜机理和各种性能表征技术。