This paper proposes a novel 3-DOFs positioner system with large travel ranges is presented, which can be integrated with atomic force microscope (AFM) for precise positioning.

 
  • 本论文研究之目的是设计并实现一新型、长行程、三自由度运动的奈米级定位平台,此平台能够整合并应用于原子力显微镜,来达成长行程与精密定位之需求。
今日热词
目录 附录 查词历史