This paper introduce working principle and main circuit of DC-arc of plasma generator CVD. the control of temperature and particle size of nanometal powder and metal oxide nanoparticle are analyzed.

• 介绍了等离子体发生器化学气相反应法(CVD)的工作原理和直流电弧主电路,并对此法制备金属纳米和金属纳米氧化物过程中温度、颗粒形态的控制进行了分析。