This paper deals with the function of oxygen in Ti(CN) film prepared by PCVD. With the oxygen the structure of Ti(CNO) films is of fine grains instead of the columnar grains of TiN.

• 研究了Ti（CN）薄膜内氧的作用，研究结果表明，Ti（CN）薄膜内加入氧后可以消除薄膜的柱状晶结构，薄膜的断面呈致密的纤维状组织。