Theoretical analysis showed that under well specified conditions, electromagnetic slow wave can interact stationary with moving periodic structure,based on that the a working principle can be proposed for a class of MEMS motor and actuator.

• 理论分析表明,在特定的条件下,电磁慢波与运动周期结构之间可以发生稳定的相互作用,这能够成为一大类MEMS电机或执行器的一种不同的工作原理。