The surface morphology, composition and adhesion of the diamond films were investigated by means of field emission scanning electron microscope (FESEM), X-ray diffractometer (XRD) and Rockwell hardness tester, respectively.

 
  • 沉积气压为20Torr;基体温度为770±20℃;碳源浓度由3.;3%25匀速降为1
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