The relative error between the EOT extracted by this two-step approach and by the quantum corrected Poisson equation is less than 5%,thus validating the approach.

• 采用该两步法提取的HfO2高k栅介质EOT与包含量子修正的Poisson方程数值模拟结果对比；误差小于5%25；验证了该方法的正确性.