The properties of spatial distribution of plasma ion density in RF TCP plasma reaction chamber were diagnosed by a Langmuir probe and the effect of air pressure were investigated.

• 利用朗缪尔静电单探针诊断了射频TCP离子束辅助电子枪蒸发镀膜装置反应室内等离子体密度的空间分布规律；并分析了气压对等离子体分布的影响.