The properties of films were detected by Raman spectroscopy, FTIR, XPS, SEM, AFM, scratch test, friction test, and indentation test.

• 对所制备的DLC膜采用拉曼光谱(Raman)、傅立叶红外透射光谱(FTIR)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、划痕仪、摩擦磨损仪、纳米压痕仪等方法进行了性能测量研究。