The process defect,minor defect and key precess,their impact on quality and reliability,and the control method are introduced.

• 摘要：重点介绍了国内外半导体器件制造工艺与器件可靠性的相关性报道：缺陷、微缺陷、关键工艺对器件质量和可靠性的影响及其控制方法；