The priming pressure, static and dynamic characteristics of cantilever microvalve are analyzed to obtain the relationship between geometrical size, static pressure difference and flow rate.

• 对悬臂梁式微型阀的启动、静态和动态过流特性进行了分析和模拟。得到了微型阀的启动压力和静态下阀的流量与压差的关系以及阀片的几何尺寸对阀的流量的影响。