The photolithographic use of nonphotosensitive polyimids is very complicated, and when a photosensitive polyimid is employed,the pattern generation is simplified.

 
  • 采用非光敏聚酰亚胺时光刻工艺相当复杂,而使用光敏聚酰亚胺时图形加工工艺得到简化,因而引起人们的极大兴趣。
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