The oxide films were investigated by means of scanning electron microcopy(SEM),energy dispersion X-ray microanalyser(EDX),X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS).

• 用扫描电镜、能谱仪、X射线衍射、X射线光电子能谱对氧化膜进行了研究。