The optical properties and components of the films were characterized by spectroscopic ellipsometry, X-ray photoelectron spectroscopy and Perkin-Elmer Lambda900 spectrophotometer, etc. .

• 通过椭圆偏振仪、X-ray光电子能谱、分光计等设备,对制备薄膜的光学性能、成分进行了表征。