The nonlinearity of moment-angle relationship of the beams in a kind of micromachine vibratory angular rate sensor is derived by using energy method.

• 用能量法计算了振动轮式微机械角速率传感器中梁的力矩一转角的非线性关系，分析了在这种非线性影响下的传感器幅频、相频特性。