The modeling methodology based on the MWR (Method of Weighted Residuals), which may be the uniform modeling method of MEMS system-level simulation, is proposed.

• 着重介绍了适合于MEMS系统级仿真的两个基本模型的基本思想、构造方法．提出用加权残值法(MWR)建立MEMS系统级仿真模型；