The microstructures and optical properties of the films are characterized by a prism coupler,a Fourier transform infrared spectroscopy (FTIR) and an Atom Force Microscopy (AFM).

• 研究了薄膜折射率和淀积速率与工艺参数之间的关系，通过棱镜耦合仪、傅立叶变换红外光谱、原子力显微镜、扫描电子显微镜等测试手段，分析了薄膜的结构和光学特性。