The microprobe,approaching example surface in tap mode until several tens nanometers to surface,generates inclination because of atom force.

• 微探针以轻敲式接近样品至几十纳米时,受原子力作用发生偏转,利用双频干涉模块度量其纵向偏转量,并对样品进行梳状式度量得到外观形貌。